JPH0170259U - - Google Patents
Info
- Publication number
- JPH0170259U JPH0170259U JP1987166056U JP16605687U JPH0170259U JP H0170259 U JPH0170259 U JP H0170259U JP 1987166056 U JP1987166056 U JP 1987166056U JP 16605687 U JP16605687 U JP 16605687U JP H0170259 U JPH0170259 U JP H0170259U
- Authority
- JP
- Japan
- Prior art keywords
- ion beam
- ion
- semiconductor wafer
- deflection means
- groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 8
- 238000005468 ion implantation Methods 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000002513 implantation Methods 0.000 claims 1
- 238000002347 injection Methods 0.000 claims 1
- 239000007924 injection Substances 0.000 claims 1
- 239000003990 capacitor Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987166056U JPH0170259U (en]) | 1987-10-28 | 1987-10-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987166056U JPH0170259U (en]) | 1987-10-28 | 1987-10-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0170259U true JPH0170259U (en]) | 1989-05-10 |
Family
ID=31453100
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987166056U Pending JPH0170259U (en]) | 1987-10-28 | 1987-10-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0170259U (en]) |
-
1987
- 1987-10-28 JP JP1987166056U patent/JPH0170259U/ja active Pending